Nozzle-point type

Megasonic Cleaning Systems

Point type

YMMS

Megasonic Cleaning Systems is the use of transducers to emit megahertz high energy sound waves, the solution molecules in the sound wave under the promotion of accelerated motion, with strong sound pressure gradient and sound flow action produced by the high-speed fluid dynamics layer continuous impact, adsorption of fine particles desorption cleaning technology.

  Characteristics  

Megasonic Cleaning Systems does not produce strong cavitation effect, which can avoid damage to the surface of the cleaning object and residual pollutants in the cleaning process. Megabound cleaning efficiency is high, time is short, the use of cleaning agent concentration is low, the consumption of chemical reagents is less, so the level of harm to the environment is low.

  Device Features  

● Single point spray type mega sound cleaning, compared with the traditional trough cleaning, can solve the problem of cleaning liquid secondary pollution;

● Very low ultrasonic cavitation effect, will not cause damage to the device surface;

● No metal material contact liquid, no conductive material shedding risk;

● High anticorrosion, can resist all kinds of acid and base solutions and organic solvents;

● Ultra-high cleaning precision, can remove the surface of the object 0.2 micron stain particles;

● Comprehensive non-metallic high anti-corrosion material, suitable for a variety of acid base and organic solvents;

● Quartz or sapphire matching layer technology, no impurities fall off the risk of the device;

● Unique transducer fitting technology, higher stability and durability;

● The innovative semiconductor technology of the mega sound generator, fully realize the digital high-frequency high-power drive;

  Application  

• CMP chemical mechanical polishing

• Wash before bonding

• Mask cleaning

• developing

• stripping

• Lift-off metal stripping

• Wet etching

• The lens cleaning

• Display and other microelectronics industry precision cleaning