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Trough type megasonic Cleaning generally places the megaacoustic emission device at the bottom of the sink, and the wafer is placed in the sink during cleaning. The advantage of this method is that it is easy to use and can be used for batch cleaning of products. At present, the batch cleaning, chemical mechanical polishing, etching, development and other wet processing of wafers are mostly using the trough megasound device. We use special coupling technology to precisely match the piezoelectric transducer with the quartz or sapphire oscillating layer, which can effectively emit a uniform megasound sound field into the cleaning tank.
Megasonic Cleaning Systems
Vibration plate type
YMMS
● Megabyte vibration plate, used for assembling groove type Megabyte cleaning equipment;
● 1MHz ultra high frequency ultrasound, more refined sound processing effect;
● Uniform mega sound field, vibration plate surface sound intensity can exceed 5W/cm2;
● Advanced quartz and sapphire coupling technology, no risk of impurities falling off;
● Ultra-low acoustic cavitation effect, does not damage the surface of the device;
● High corrosion resistance, can resist all kinds of acid and alkali solutions and organic solvents;
Characteristics
Megasonic Cleaning Systems does not produce strong cavitation effect, which can avoid damage to the surface of the cleaning object and residual pollutants in the cleaning process. Megabound cleaning efficiency is high, time is short, the use of cleaning agent concentration is low, the consumption of chemical reagents is less, so the level of harm to the environment is low.
Advantage
● can be directly installed to the bottom of the cleaning tank megabanking plate, convenient for secondary development;
● MeAE sound field distribution is uniform, improve cleaning uniformity;
● Very low ultrasonic cavitation effect, will not cause damage to the device surface;
● High-power Megabyte acoustic transducer, the sound intensity of the plate surface can reach more than 5W/cm2;
● Quartz or sapphire matching layer technology, no risk of impurities falling off the device;
● Can be comprehensive non-metallic high anticorrosion material, adapt to all kinds of acid and alkali and organic solvents;
● Unique transducer fitting technology, higher stability and durability;
● The third generation of semiconductor technology megabound generator, fully realize digital high frequency high power drive;
Device Features
Input power: 600-1200W;
Frequency: 1 MHZ;
Effective cleaning area: 135-160mm;
Megabyte vibration plate, used for assembling groove type Megabyte cleaning equipment;
1MHz ultra high frequency mega sound wave, finer sound processing effect;
The sound intensity on the surface of the plate can exceed 5W/cm2;
Advanced quartz and sapphire coupling technology, no risk of impurities falling off;
Ultra-low acoustic cavitation effect, no damage to device surface;
High anticorrosion, can resist all kinds of acid and alkali solutions and organic solvents;
Megasonic emission sound field distribution is uniform, improve cleaning uniformity;
Can be comprehensive non-metallic high anticorrosion material, suitable for all kinds of acid and alkali and organic solvents;
Unique transducer fitting technology for higher stability and durability;
Technical parameters
● Input power: 600-1200W
● Frequency: 1MHz
● Effective cleaning area: 135-280mm
● Material: electric polishing surface
● Weight: 3-7kg
● Corresponding wafer size: 6-8inch
● Liquid temperature range: 5-80℃
● Sensor: PZT
Megasonic Cleaning Systems
Vibration plate type
YMMS
● Megabyte vibration plate, used for assembling groove type Megabyte cleaning equipment;
● 1MHz ultra high frequency ultrasound, more refined sound processing effect;
● Uniform mega sound field, vibration plate surface sound intensity can exceed 5W/cm2;
● Advanced quartz and sapphire coupling technology, no risk of impurities falling off;
● Ultra-low acoustic cavitation effect, does not damage the surface of the device;
● High corrosion resistance, can resist all kinds of acid and alkali solutions and organic solvents;
Characteristics
Megasonic Cleaning Systems does not produce strong cavitation effect, which can avoid damage to the surface of the cleaning object and residual pollutants in the cleaning process. Megabound cleaning efficiency is high, time is short, the use of cleaning agent concentration is low, the consumption of chemical reagents is less, so the level of harm to the environment is low.
Advantage
● can be directly installed to the bottom of the cleaning tank megabanking plate, convenient for secondary development;
● MeAE sound field distribution is uniform, improve cleaning uniformity;
● Very low ultrasonic cavitation effect, will not cause damage to the device surface;
● High-power Megabyte acoustic transducer, the sound intensity of the plate surface can reach more than 5W/cm2;
● Quartz or sapphire matching layer technology, no risk of impurities falling off the device;
● Can be comprehensive non-metallic high anticorrosion material, adapt to all kinds of acid and alkali and organic solvents;
● Unique transducer fitting technology, higher stability and durability;
● The third generation of semiconductor technology megabound generator, fully realize digital high frequency high power drive;
Device Features
Input power: 600-1200W;
Frequency: 1 MHZ;
Effective cleaning area: 135-160mm;
Megabyte vibration plate, used for assembling groove type Megabyte cleaning equipment;
1MHz ultra high frequency mega sound wave, finer sound processing effect;
The sound intensity on the surface of the plate can exceed 5W/cm2;
Advanced quartz and sapphire coupling technology, no risk of impurities falling off;
Ultra-low acoustic cavitation effect, no damage to device surface;
High anticorrosion, can resist all kinds of acid and alkali solutions and organic solvents;
Megasonic emission sound field distribution is uniform, improve cleaning uniformity;
Can be comprehensive non-metallic high anticorrosion material, suitable for all kinds of acid and alkali and organic solvents;
Unique transducer fitting technology for higher stability and durability;
Technical parameters
● Input power: 600-1200W
● Frequency: 1MHz
● Effective cleaning area: 135-280mm
● Material: electric polishing surface
● Weight: 3-7kg
● Corresponding wafer size: 6-8inch
● Liquid temperature range: 5-80℃
● Sensor: PZT
