Semiconductor wafer

A semiconductor wafer cleaning device for mega sound, involves the field of semiconductor integrated circuit device cleaning technology, including the vacuum suction cups for adsorption of semiconductor chips, and described the vacuum chuck supporting the rotation of the drive, setting it is vacuum cups at the top of the signs in the nozzle, and described trillion nozzle connected mega sound generator, whose character is: The waste water collecting device is arranged outside the vacuum sucker, the waste water collecting device comprises a collecting tank located below the vacuum sucker and is annular, and the collecting tank is connected with the outer wall of the collecting tank and the collecting tank is communicated with the drainage pipe, the top surface of the collecting cylinder is higher than the lower end face of the megabanding nozzle. The invention has the beneficial technical effect that it can effectively collect the waste water produced in the cleaning process and prevent the secondary pollution to the chip.